blog.imm.cnr.it

Vi comunico che giorno 24 marzo alle ore 11 in sala Campisano
(CNR-IMM, zona industriale, strada VIII n°5, Catania)
la dottoressa **Assunta Vigliante Head of Business Development* in
Bruker AXS * Karlsruhe* (Germany)
terrà un seminario dal titolo:
Applications of X-ray scattering to electronic materials

siete tutti invitati a partecipare e ad estendere l'invito a chi di
interesse.

Abstract
X-ray metrology is starting to play a significant role for material
characterization or process control for technology nodes below the 45nm.
In this talk, I will present Bruker AXS metrology solutions ranging from
off line R & D characterization to fully automated in-line metrology for
semiconductor manufacturing. Solutions are based on X-ray diffraction
(XRR, XRD, HRXRD and micro HRXRD) and X-fluorescence (XRF and micro
XRF). Materials of technological interests are: SiGe, exotic oxides,
high and low /K/ dielectrics, new materials for interconnects, memory
storage/spintronics, photovoltaics and MEMS.

saluti

Alessandra Alberti