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Cari tutti,

vi ricordiamo l'incontro SMeet di venerdì 17 dicembre alle ore 11:30.

Per chi volesse partecipare in presenza, ricordiamo di prenotarsi tramite il seguente doodle:

https://link.cnr.it/smeet-survey

Per coloro che parteciperanno on-line, l' ammissione in stanza virtuale sarà disponibile dalle 11:20  tramite la piattaforma Microsoft Teams, attraverso il seguente link:

https://link.cnr.it/smeet-imm

Il meeting prevede:

* Speaker: Dott. Antonino La Magna
* Chair: Dott. F. Giannazzo
* Titolo: Complexity under control: the multiscale process simulation

* Abstract: Micro- and nano-electronics device manufacturing integrates a sequence of process steps often based oncomplex kinetics which must be controlled with high accuracy. New requirements, due to the integration ofinnovative materials or to the more aggressive specification of the next-coming technological node, makeever and ever inefficient the conventional strategy based on “almost” blind Design of Experiments (DoE)procedures (i.e. large matrix of characterizations analyses varying the process parameters). The use ofaccurate methods for the Technology Computer Aided Design (TCAD) able to simulate the atomisticevolution of the material during the processes at the experimental time-space scale (i.e. minutes-microns)could represent a critical supporting tool for the development of next device generations.The IMM-Catania is an internationally recognized centre for the computational researches supporting theimplementation of innovative TCAD tools, and in this contribution an overview of current state of the IMMTCAD activities will be given. Kinetics of systems at different scale concurs to the processes’ performances;therefore the predictivity of numerical techniques relies on a multiscale approach, where the top level (fewhundreds atom and quantum mechanics theory) consists in accurate ab-initio studies. The differentmethods, the observable quantities which they simulate, their integration from macro to the micro scales,their predictivity potential and the comparisons with reference experimental studies will be presented.Particular focused arguments will be discussed in the details which are argument of recent Europeanprojects [1-3]. Finally, a brief presentation of the proprietary open-source project MulSKIPS [4], where IMMadvanced codes will be integrate for a fast and universal use, will be given.
[1] CHALLENGE Project www.h2020challenge.eu
[2] Madein4 Project https://madein4.eu
[3] MUNDFAB Project www.mundfab.eu
[4] https://github.com/MulSKIPS/MulSKIPS

Vi aspettiamo numerosi,

Saluti

SMeet – Comitato Organizzativo
smeet[@]imm.cnr.it
Web-page: https://hq.imm.cnr.it/smeet-science-sharing-meetings