Dear Colleague,
on behalf of the organizing committee, I would like to invite you to submit an abstract to the
online edition of the
SIS 2020 Workshop that will be held on
December 14-15, 2020. The workshop will include two half days of talks and discussions from 3 pm to 6 pm (Rome time)
This workshop follows previous edition in 2020 hosted in Milan. The workshop will focus on the challenges related to potential applications of SIS as well as to understanding of fundamental mechanisms. It will offer an event dedicated to present, discuss, exchange knowledge, and getting informed about the most recent developments. The intersection of different communities interested in SIS, originated either from research on atomic layer deposition (ALD) or on advanced lithography, evidences the need of an event to bring together and to contaminate the different approaches to this topic.
In particular, Topics of interest for the workshop will include, but will not be limited to:
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ALD/SIS/Vapor Phase Infiltration (VPI)
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Resists and block copolymers
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Precursors, materials and processes
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In-situ and ex-situ characterizations
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Hybrid materials
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Functionalities and applications
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Advanced modelling
Current list of confirmed invited speakers includes:
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Prof. Gitty Frey - Technion - Israel Institute of Technology
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Prof. Shunya Ito - Tohoku University
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Dr. Seth Darling - Argonne National Laboratory
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Prof. Mark Losego - Georgia Institute of Technology
We encourage you to be a part of this important event aiming at opening new perspectives for this interesting research field. Please consider submitting your abstract during the submission period, and plan on joining us .
Organizing Committee
- Michele Perego - CNR - Institute of Microelectronics and Microsystems (Italy)
- Gabriele SEguini - CNR - Institute of Microelectronics and Microsystems (Italy)
- Tamar Segal Peretz - Technion - Israel Institute of Technology (Israel)
- Chang-Yong Nam - Brookhaven National Laboratory (USA)
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Michele Perego, PhD
Research Director
IMM-CNR, Unit of Agrate Brianza
Via C. Olivetti 2,
I-20864 Agrate Brianza (MB)
http://www.mdm.imm.cnr.it
mail: michele.perego[@]mdm.imm.cnr.it
Phone: +39 039 603 63 83 (Office)
+39 039 603 51 43 (Lab)
+39 039 688 11 75 (Fax)
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